Variation of optical parameters of multilayer structures with thin silicon layers at laser annealing
Збережено в:
| Дата: | 2014 |
|---|---|
| Автор: | |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2014
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| Назва видання: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000352790 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-72707 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-727072024-04-16T17:08:47Z Variation of optical parameters of multilayer structures with thin silicon layers at laser annealing O. B. Okhrimenko 1560-8034 2014 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000352790 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics O. B. Okhrimenko Variation of optical parameters of multilayer structures with thin silicon layers at laser annealing |
| format |
Article |
| author |
O. B. Okhrimenko |
| author_facet |
O. B. Okhrimenko |
| author_sort |
O. B. Okhrimenko |
| title |
Variation of optical parameters of multilayer structures with thin silicon layers at laser annealing |
| title_short |
Variation of optical parameters of multilayer structures with thin silicon layers at laser annealing |
| title_full |
Variation of optical parameters of multilayer structures with thin silicon layers at laser annealing |
| title_fullStr |
Variation of optical parameters of multilayer structures with thin silicon layers at laser annealing |
| title_full_unstemmed |
Variation of optical parameters of multilayer structures with thin silicon layers at laser annealing |
| title_sort |
variation of optical parameters of multilayer structures with thin silicon layers at laser annealing |
| publishDate |
2014 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000352790 |
| work_keys_str_mv |
AT obokhrimenko variationofopticalparametersofmultilayerstructureswiththinsiliconlayersatlaserannealing |
| first_indexed |
2024-04-17T05:14:31Z |
| last_indexed |
2024-04-17T05:14:31Z |
| _version_ |
1796884863049007104 |