Variation of optical parameters of multilayer structures with thin silicon layers at laser annealing
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| Datum: | 2014 |
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| 1. Verfasser: | |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2014
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| Schriftenreihe: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000352790 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859529737024569344 |
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| author | O. B. Okhrimenko |
| author_facet | O. B. Okhrimenko |
| author_sort | O. B. Okhrimenko |
| collection | Open-Science |
| first_indexed | 2025-07-22T07:02:51Z |
| format | Article |
| id | open-sciencenbuvgovua-72707 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T07:02:51Z |
| publishDate | 2014 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-727072024-04-16T17:08:47Z Variation of optical parameters of multilayer structures with thin silicon layers at laser annealing O. B. Okhrimenko 1560-8034 2014 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000352790 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics O. B. Okhrimenko Variation of optical parameters of multilayer structures with thin silicon layers at laser annealing |
| title | Variation of optical parameters of multilayer structures with thin silicon layers at laser annealing |
| title_full | Variation of optical parameters of multilayer structures with thin silicon layers at laser annealing |
| title_fullStr | Variation of optical parameters of multilayer structures with thin silicon layers at laser annealing |
| title_full_unstemmed | Variation of optical parameters of multilayer structures with thin silicon layers at laser annealing |
| title_short | Variation of optical parameters of multilayer structures with thin silicon layers at laser annealing |
| title_sort | variation of optical parameters of multilayer structures with thin silicon layers at laser annealing |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000352790 |
| work_keys_str_mv | AT obokhrimenko variationofopticalparametersofmultilayerstructureswiththinsiliconlayersatlaserannealing |