Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing - O. V. Steblova; A. A. Evtukh; O. L. Bratus; L. L. Fedorenko; M. V. Voitovych; O. S. Lytvyn; O. O. Gavrylyuk; Yu. Semchuk (Semiconductor Physics, Quantum Electronics and Optoelectronics, 2014)