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Transformation of SiOx films into nanocomposite SiO2(Si) films under thermal and laser annealing

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Bibliographic Details
Date:	2014
Main Authors:	O. V. Steblova, A. A. Evtukh, O. L. Bratus, L. L. Fedorenko, M. V. Voitovych, O. S. Lytvyn, O. O. Gavrylyuk, Yu. Semchuk
Format:	Article
Language:	English
Published:	2014
Series:	Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000352938
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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