Gladkovskij, V. V., Kostin, E. G., Polozov, B. P., Fedorovich, O. A., & Petrjakov, V. A. (2014). The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films.
Chicago Style (17th ed.) CitationGladkovskij, V. V., E. G. Kostin, B. P. Polozov, O. A. Fedorovich, and V. A. Petrjakov. The Influence of HF Discharge Parameters and Heater Settings on the Substrate Temperature in the Plasma-chemical Reactor "Almaz" for the Synthesis of Diamond-like Carbon Films. 2014.
MLA (8th ed.) CitationGladkovskij, V. V., et al. The Influence of HF Discharge Parameters and Heater Settings on the Substrate Temperature in the Plasma-chemical Reactor "Almaz" for the Synthesis of Diamond-like Carbon Films. 2014.