The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films
Gespeichert in:
| Datum: | 2014 |
|---|---|
| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2014
|
| Schriftenreihe: | Technology and design in electronic equipment |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000405303 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-73844 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-738442024-04-16T17:15:50Z The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films V. V. Gladkovskij E. G. Kostin B. P. Polozov O. A. Fedorovich V. A. Petrjakov 2225-5818 2014 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000405303 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Technology and design in electronic equipment |
| spellingShingle |
Technology and design in electronic equipment V. V. Gladkovskij E. G. Kostin B. P. Polozov O. A. Fedorovich V. A. Petrjakov The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| format |
Article |
| author |
V. V. Gladkovskij E. G. Kostin B. P. Polozov O. A. Fedorovich V. A. Petrjakov |
| author_facet |
V. V. Gladkovskij E. G. Kostin B. P. Polozov O. A. Fedorovich V. A. Petrjakov |
| author_sort |
V. V. Gladkovskij |
| title |
The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| title_short |
The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| title_full |
The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| title_fullStr |
The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| title_full_unstemmed |
The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| title_sort |
influence of hf discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "almaz" for the synthesis of diamond-like carbon films |
| publishDate |
2014 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000405303 |
| work_keys_str_mv |
AT vvgladkovskij theinfluenceofhfdischargeparametersandheatersettingsonthesubstratetemperatureintheplasmachemicalreactorquotalmazquotforthesynthesisofdiamondlikecarbonfilms AT egkostin theinfluenceofhfdischargeparametersandheatersettingsonthesubstratetemperatureintheplasmachemicalreactorquotalmazquotforthesynthesisofdiamondlikecarbonfilms AT bppolozov theinfluenceofhfdischargeparametersandheatersettingsonthesubstratetemperatureintheplasmachemicalreactorquotalmazquotforthesynthesisofdiamondlikecarbonfilms AT oafedorovich theinfluenceofhfdischargeparametersandheatersettingsonthesubstratetemperatureintheplasmachemicalreactorquotalmazquotforthesynthesisofdiamondlikecarbonfilms AT vapetrjakov theinfluenceofhfdischargeparametersandheatersettingsonthesubstratetemperatureintheplasmachemicalreactorquotalmazquotforthesynthesisofdiamondlikecarbonfilms AT vvgladkovskij influenceofhfdischargeparametersandheatersettingsonthesubstratetemperatureintheplasmachemicalreactorquotalmazquotforthesynthesisofdiamondlikecarbonfilms AT egkostin influenceofhfdischargeparametersandheatersettingsonthesubstratetemperatureintheplasmachemicalreactorquotalmazquotforthesynthesisofdiamondlikecarbonfilms AT bppolozov influenceofhfdischargeparametersandheatersettingsonthesubstratetemperatureintheplasmachemicalreactorquotalmazquotforthesynthesisofdiamondlikecarbonfilms AT oafedorovich influenceofhfdischargeparametersandheatersettingsonthesubstratetemperatureintheplasmachemicalreactorquotalmazquotforthesynthesisofdiamondlikecarbonfilms AT vapetrjakov influenceofhfdischargeparametersandheatersettingsonthesubstratetemperatureintheplasmachemicalreactorquotalmazquotforthesynthesisofdiamondlikecarbonfilms |
| first_indexed |
2025-07-22T07:20:45Z |
| last_indexed |
2025-07-22T07:20:45Z |
| _version_ |
1850419060208041984 |