The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films
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| Date: | 2014 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2014
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| Series: | Technology and design in electronic equipment |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000405303 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859530583761223680 |
|---|---|
| author | V. V. Gladkovskij E. G. Kostin B. P. Polozov O. A. Fedorovich V. A. Petrjakov |
| author_facet | V. V. Gladkovskij E. G. Kostin B. P. Polozov O. A. Fedorovich V. A. Petrjakov |
| author_sort | V. V. Gladkovskij |
| collection | Open-Science |
| first_indexed | 2025-07-22T07:20:45Z |
| format | Article |
| id | open-sciencenbuvgovua-73844 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T07:20:45Z |
| publishDate | 2014 |
| record_format | dspace |
| series | Technology and design in electronic equipment |
| spelling | open-sciencenbuvgovua-738442024-04-16T17:15:50Z The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films V. V. Gladkovskij E. G. Kostin B. P. Polozov O. A. Fedorovich V. A. Petrjakov 2225-5818 2014 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000405303 Article |
| spellingShingle | Technology and design in electronic equipment V. V. Gladkovskij E. G. Kostin B. P. Polozov O. A. Fedorovich V. A. Petrjakov The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| title | The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| title_full | The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| title_fullStr | The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| title_full_unstemmed | The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| title_short | The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| title_sort | influence of hf discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "almaz" for the synthesis of diamond-like carbon films |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000405303 |
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