The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films
Збережено в:
| Дата: | 2014 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2014
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| Назва видання: | Technology and design in electronic equipment |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000405303 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-73844 |
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| record_format |
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open-sciencenbuvgovua-738442024-04-16T17:15:50Z The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films V. V. Gladkovskij E. G. Kostin B. P. Polozov O. A. Fedorovich V. A. Petrjakov 2225-5818 2014 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000405303 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Technology and design in electronic equipment |
| spellingShingle |
Technology and design in electronic equipment V. V. Gladkovskij E. G. Kostin B. P. Polozov O. A. Fedorovich V. A. Petrjakov The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| format |
Article |
| author |
V. V. Gladkovskij E. G. Kostin B. P. Polozov O. A. Fedorovich V. A. Petrjakov |
| author_facet |
V. V. Gladkovskij E. G. Kostin B. P. Polozov O. A. Fedorovich V. A. Petrjakov |
| author_sort |
V. V. Gladkovskij |
| title |
The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| title_short |
The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| title_full |
The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| title_fullStr |
The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| title_full_unstemmed |
The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films |
| title_sort |
influence of hf discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "almaz" for the synthesis of diamond-like carbon films |
| publishDate |
2014 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000405303 |
| work_keys_str_mv |
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| first_indexed |
2024-04-17T05:19:07Z |
| last_indexed |
2024-04-17T05:19:07Z |
| _version_ |
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