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The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor &quot;Almaz&quot; for the synthesis of diamond-like carbon films

The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor &quot;Almaz&quot; for the synthesis of diamond-like carbon films

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Bibliographic Details
Main Authors: V. V. Gladkovskij, E. G. Kostin, B. P. Polozov, O. A. Fedorovich, V. A. Petrjakov
Format: Article
Language:English
Published: 2014
Series:Technology and design in electronic equipment
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000405303
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spelling open-sciencenbuvgovua-738442024-04-16T17:15:50Z The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor &quot;Almaz&quot; for the synthesis of diamond-like carbon films V. V. Gladkovskij E. G. Kostin B. P. Polozov O. A. Fedorovich V. A. Petrjakov 2225-5818 2014 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000405303 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Technology and design in electronic equipment
spellingShingle Technology and design in electronic equipment
V. V. Gladkovskij
E. G. Kostin
B. P. Polozov
O. A. Fedorovich
V. A. Petrjakov
The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor &quot;Almaz&quot; for the synthesis of diamond-like carbon films
format Article
author V. V. Gladkovskij
E. G. Kostin
B. P. Polozov
O. A. Fedorovich
V. A. Petrjakov
author_facet V. V. Gladkovskij
E. G. Kostin
B. P. Polozov
O. A. Fedorovich
V. A. Petrjakov
author_sort V. V. Gladkovskij
title The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor &quot;Almaz&quot; for the synthesis of diamond-like carbon films
title_short The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor &quot;Almaz&quot; for the synthesis of diamond-like carbon films
title_full The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor &quot;Almaz&quot; for the synthesis of diamond-like carbon films
title_fullStr The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor &quot;Almaz&quot; for the synthesis of diamond-like carbon films
title_full_unstemmed The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor &quot;Almaz&quot; for the synthesis of diamond-like carbon films
title_sort influence of hf discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor &quot;almaz&quot; for the synthesis of diamond-like carbon films
publishDate 2014
url http://jnas.nbuv.gov.ua/article/UJRN-0000405303
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first_indexed 2024-04-17T05:19:07Z
last_indexed 2024-04-17T05:19:07Z
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