The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films

Збережено в:
Бібліографічні деталі
Дата:2014
Автори: V. V. Gladkovskij, E. G. Kostin, B. P. Polozov, O. A. Fedorovich, V. A. Petrjakov
Формат: Стаття
Мова:Англійська
Опубліковано: 2014
Назва видання:Technology and design in electronic equipment
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0000405303
Теги: Додати тег
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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author V. V. Gladkovskij
E. G. Kostin
B. P. Polozov
O. A. Fedorovich
V. A. Petrjakov
author_facet V. V. Gladkovskij
E. G. Kostin
B. P. Polozov
O. A. Fedorovich
V. A. Petrjakov
author_sort V. V. Gladkovskij
collection Open-Science
first_indexed 2025-07-22T07:20:45Z
format Article
id open-sciencenbuvgovua-73844
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
language English
last_indexed 2025-07-22T07:20:45Z
publishDate 2014
record_format dspace
series Technology and design in electronic equipment
spelling open-sciencenbuvgovua-738442024-04-16T17:15:50Z The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films V. V. Gladkovskij E. G. Kostin B. P. Polozov O. A. Fedorovich V. A. Petrjakov 2225-5818 2014 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000405303 Article
spellingShingle Technology and design in electronic equipment
V. V. Gladkovskij
E. G. Kostin
B. P. Polozov
O. A. Fedorovich
V. A. Petrjakov
The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films
title The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films
title_full The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films
title_fullStr The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films
title_full_unstemmed The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films
title_short The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "Almaz" for the synthesis of diamond-like carbon films
title_sort influence of hf discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor "almaz" for the synthesis of diamond-like carbon films
url http://jnas.nbuv.gov.ua/article/UJRN-0000405303
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