2025-02-24T00:23:25-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22open-sciencenbuvgovua-73844%22&qt=morelikethis&rows=5
2025-02-24T00:23:25-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22open-sciencenbuvgovua-73844%22&qt=morelikethis&rows=5
2025-02-24T00:23:25-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-24T00:23:25-05:00 DEBUG: Deserialized SOLR response
The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor &quot;Almaz&quot; for the synthesis of diamond-like carbon films

The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor &quot;Almaz&quot; for the synthesis of diamond-like carbon films

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Bibliographic Details
Main Authors: V. V. Gladkovskij, E. G. Kostin, B. P. Polozov, O. A. Fedorovich, V. A. Petrjakov
Format: Article
Language:English
Published: 2014
Series:Technology and design in electronic equipment
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000405303
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2025-02-24T00:23:25-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&rows=40&rows=5&wt=json&json.nl=arrarr&q=id%3A%22open-sciencenbuvgovua-73844%22&qt=morelikethis
2025-02-24T00:23:25-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&rows=40&rows=5&wt=json&json.nl=arrarr&q=id%3A%22open-sciencenbuvgovua-73844%22&qt=morelikethis
2025-02-24T00:23:25-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-24T00:23:25-05:00 DEBUG: Deserialized SOLR response

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