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The influence of HF discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor &quot;Almaz&quot; for the synthesis of diamond-like carbon films

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Bibliographische Detailangaben
Datum:	2014
Hauptverfasser:	V. V. Gladkovskij, E. G. Kostin, B. P. Polozov, O. A. Fedorovich, V. A. Petrjakov
Format:	Artikel
Sprache:	Englisch
Veröffentlicht:	2014
Schriftenreihe:	Technology and design in electronic equipment
Online Zugang:	http://jnas.nbuv.gov.ua/article/UJRN-0000405303
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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