Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics
Збережено в:
| Дата: | 2014 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2014
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| Назва видання: | Nanosystems, nanomaterials, nanotechnologies |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000476016 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859531751558217728 |
|---|---|
| author | V. V. Vaskevich V. E. Gajshun D. L. Kovalenko |
| author_facet | V. V. Vaskevich V. E. Gajshun D. L. Kovalenko |
| author_sort | V. V. Vaskevich |
| collection | Open-Science |
| first_indexed | 2025-07-22T07:40:54Z |
| format | Article |
| id | open-sciencenbuvgovua-75309 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T07:40:54Z |
| publishDate | 2014 |
| record_format | dspace |
| series | Nanosystems, nanomaterials, nanotechnologies |
| spelling | open-sciencenbuvgovua-753092024-04-16T17:26:05Z Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics V. V. Vaskevich V. E. Gajshun D. L. Kovalenko 1816-5230 2014 en Nanosystems, nanomaterials, nanotechnologies http://jnas.nbuv.gov.ua/article/UJRN-0000476016 Article |
| spellingShingle | Nanosystems, nanomaterials, nanotechnologies V. V. Vaskevich V. E. Gajshun D. L. Kovalenko Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics |
| title | Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics |
| title_full | Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics |
| title_fullStr | Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics |
| title_full_unstemmed | Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics |
| title_short | Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics |
| title_sort | synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000476016 |
| work_keys_str_mv | AT vvvaskevich synthesisandstudyofsilicatesolgelcoatingsformicroandnanoelectronics AT vegajshun synthesisandstudyofsilicatesolgelcoatingsformicroandnanoelectronics AT dlkovalenko synthesisandstudyofsilicatesolgelcoatingsformicroandnanoelectronics |