Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering
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| Datum: | 2014 |
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| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2014
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| Schriftenreihe: | Nanosystems, nanomaterials, nanotechnologies |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000476018 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859531752513470464 |
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| author | O. I. Vjunov L. L. Kovalenko A. G. Belous O. Bohnke C. Bohnke |
| author_facet | O. I. Vjunov L. L. Kovalenko A. G. Belous O. Bohnke C. Bohnke |
| author_sort | O. I. Vjunov |
| collection | Open-Science |
| first_indexed | 2025-07-22T07:40:55Z |
| format | Article |
| id | open-sciencenbuvgovua-75311 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T07:40:55Z |
| publishDate | 2014 |
| record_format | dspace |
| series | Nanosystems, nanomaterials, nanotechnologies |
| spelling | open-sciencenbuvgovua-753112024-04-16T17:26:13Z Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering O. I. Vjunov L. L. Kovalenko A. G. Belous O. Bohnke C. Bohnke 1816-5230 2014 en Nanosystems, nanomaterials, nanotechnologies http://jnas.nbuv.gov.ua/article/UJRN-0000476018 Article |
| spellingShingle | Nanosystems, nanomaterials, nanotechnologies O. I. Vjunov L. L. Kovalenko A. G. Belous O. Bohnke C. Bohnke Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering |
| title | Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering |
| title_full | Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering |
| title_fullStr | Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering |
| title_full_unstemmed | Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering |
| title_short | Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering |
| title_sort | fabrication of nanosize lipon films by means of high-frequency magnetron sputtering |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000476018 |
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