Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering
Збережено в:
| Дата: | 2014 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2014
|
| Назва видання: | Nanosystems, nanomaterials, nanotechnologies |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000476018 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-75311 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-753112024-04-16T17:26:13Z Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering O. I. Vjunov L. L. Kovalenko A. G. Belous O. Bohnke C. Bohnke 1816-5230 2014 en Nanosystems, nanomaterials, nanotechnologies http://jnas.nbuv.gov.ua/article/UJRN-0000476018 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Nanosystems, nanomaterials, nanotechnologies |
| spellingShingle |
Nanosystems, nanomaterials, nanotechnologies O. I. Vjunov L. L. Kovalenko A. G. Belous O. Bohnke C. Bohnke Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering |
| format |
Article |
| author |
O. I. Vjunov L. L. Kovalenko A. G. Belous O. Bohnke C. Bohnke |
| author_facet |
O. I. Vjunov L. L. Kovalenko A. G. Belous O. Bohnke C. Bohnke |
| author_sort |
O. I. Vjunov |
| title |
Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering |
| title_short |
Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering |
| title_full |
Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering |
| title_fullStr |
Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering |
| title_full_unstemmed |
Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering |
| title_sort |
fabrication of nanosize lipon films by means of high-frequency magnetron sputtering |
| publishDate |
2014 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000476018 |
| work_keys_str_mv |
AT oivjunov fabricationofnanosizeliponfilmsbymeansofhighfrequencymagnetronsputtering AT llkovalenko fabricationofnanosizeliponfilmsbymeansofhighfrequencymagnetronsputtering AT agbelous fabricationofnanosizeliponfilmsbymeansofhighfrequencymagnetronsputtering AT obohnke fabricationofnanosizeliponfilmsbymeansofhighfrequencymagnetronsputtering AT cbohnke fabricationofnanosizeliponfilmsbymeansofhighfrequencymagnetronsputtering |
| first_indexed |
2024-04-17T05:25:04Z |
| last_indexed |
2024-04-17T05:25:04Z |
| _version_ |
1796885135421865984 |