Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering

Збережено в:
Бібліографічні деталі
Дата:2014
Автори: O. I. Vjunov, L. L. Kovalenko, A. G. Belous, O. Bohnke, C. Bohnke
Формат: Стаття
Мова:Англійська
Опубліковано: 2014
Назва видання:Nanosystems, nanomaterials, nanotechnologies
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0000476018
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

Репозитарії

Library portal of National Academy of Sciences of Ukraine | LibNAS
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author O. I. Vjunov
L. L. Kovalenko
A. G. Belous
O. Bohnke
C. Bohnke
author_facet O. I. Vjunov
L. L. Kovalenko
A. G. Belous
O. Bohnke
C. Bohnke
author_sort O. I. Vjunov
collection Open-Science
first_indexed 2025-07-22T07:40:55Z
format Article
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institution Library portal of National Academy of Sciences of Ukraine | LibNAS
language English
last_indexed 2025-07-22T07:40:55Z
publishDate 2014
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series Nanosystems, nanomaterials, nanotechnologies
spelling open-sciencenbuvgovua-753112024-04-16T17:26:13Z Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering O. I. Vjunov L. L. Kovalenko A. G. Belous O. Bohnke C. Bohnke 1816-5230 2014 en Nanosystems, nanomaterials, nanotechnologies http://jnas.nbuv.gov.ua/article/UJRN-0000476018 Article
spellingShingle Nanosystems, nanomaterials, nanotechnologies
O. I. Vjunov
L. L. Kovalenko
A. G. Belous
O. Bohnke
C. Bohnke
Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering
title Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering
title_full Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering
title_fullStr Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering
title_full_unstemmed Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering
title_short Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering
title_sort fabrication of nanosize lipon films by means of high-frequency magnetron sputtering
url http://jnas.nbuv.gov.ua/article/UJRN-0000476018
work_keys_str_mv AT oivjunov fabricationofnanosizeliponfilmsbymeansofhighfrequencymagnetronsputtering
AT llkovalenko fabricationofnanosizeliponfilmsbymeansofhighfrequencymagnetronsputtering
AT agbelous fabricationofnanosizeliponfilmsbymeansofhighfrequencymagnetronsputtering
AT obohnke fabricationofnanosizeliponfilmsbymeansofhighfrequencymagnetronsputtering
AT cbohnke fabricationofnanosizeliponfilmsbymeansofhighfrequencymagnetronsputtering