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Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering

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Bibliographic Details
Date:	2014
Main Authors:	O. I. Vjunov, L. L. Kovalenko, A. G. Belous, O. Bohnke, C. Bohnke
Format:	Article
Language:	English
Published:	2014
Series:	Nanosystems, nanomaterials, nanotechnologies
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000476018
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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