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Determination of Conditions for Transition-Metals&#039; Deposition from Their Carbonyls by Means of the LCVD-Process Simulation

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Bibliographic Details
Date:	2014
Main Authors:	K. V. Kirpenko, A. V. Nedolja, I. N. Titov
Format:	Article
Language:	English
Published:	2014
Series:	Metallophysics and advanced technologies
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000526183
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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