Determination of Conditions for Transition-Metals' Deposition from Their Carbonyls by Means of the LCVD-Process Simulation
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| Date: | 2014 |
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| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
2014
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| Series: | Metallophysics and advanced technologies |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000526183 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |