Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film
Збережено в:
| Дата: | 2014 |
|---|---|
| Автори: | , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2014
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| Назва видання: | Strength of Materials |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000576110 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-76511 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-765112024-04-16T17:35:19Z Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film S. C. Her C. L. Wu 0556-171X 2014 en Strength of Materials http://jnas.nbuv.gov.ua/article/UJRN-0000576110 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Strength of Materials |
| spellingShingle |
Strength of Materials S. C. Her C. L. Wu Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film |
| format |
Article |
| author |
S. C. Her C. L. Wu |
| author_facet |
S. C. Her C. L. Wu |
| author_sort |
S. C. Her |
| title |
Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film |
| title_short |
Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film |
| title_full |
Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film |
| title_fullStr |
Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film |
| title_full_unstemmed |
Annealing Effect on the Microstructure and Mechanical Properties of a Thin Titanium Nitride Film |
| title_sort |
annealing effect on the microstructure and mechanical properties of a thin titanium nitride film |
| publishDate |
2014 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000576110 |
| work_keys_str_mv |
AT scher annealingeffectonthemicrostructureandmechanicalpropertiesofathintitaniumnitridefilm AT clwu annealingeffectonthemicrostructureandmechanicalpropertiesofathintitaniumnitridefilm |
| first_indexed |
2024-04-17T05:29:58Z |
| last_indexed |
2024-04-17T05:29:58Z |
| _version_ |
1796885260826312704 |