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Study of the distribution of temperature profiles in nonstoichiometric SiOx films at laser annealing

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Bibliographic Details
Date:	2014
Main Authors:	O. O. Gavrylyuk, Yu. Semchuk, O. V. Steblova, A. A. Evtukh, L. L. Fedorenko
Format:	Article
Language:	English
Published:	2014
Series:	Ukrainian journal of physics
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000696134
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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