APA (7th ed.) Citation

Gavrylyuk, O. O., Semchuk, Y., Steblova, O. V., Evtukh, A. A., & Fedorenko, L. L. (2014). Study of the distribution of temperature profiles in nonstoichiometric SiOx films at laser annealing.

Chicago Style (17th ed.) Citation

Gavrylyuk, O. O., Yu Semchuk, O. V. Steblova, A. A. Evtukh, and L. L. Fedorenko. Study of the Distribution of Temperature Profiles in Nonstoichiometric SiOx Films at Laser Annealing. 2014.

MLA (8th ed.) Citation

Gavrylyuk, O. O., et al. Study of the Distribution of Temperature Profiles in Nonstoichiometric SiOx Films at Laser Annealing. 2014.

Warning: These citations may not always be 100% accurate.