Study of the distribution of temperature profiles in nonstoichiometric SiOx films at laser annealing
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| Date: | 2014 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2014
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| Series: | Ukrainian Journal of Physics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000726343 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859533686378070016 |
|---|---|
| author | O. O. Gavrylyuk Yu. Semchuk O. V. Steblova A. A. Evtukh L. L. Fedorenko |
| author_facet | O. O. Gavrylyuk Yu. Semchuk O. V. Steblova A. A. Evtukh L. L. Fedorenko |
| author_sort | O. O. Gavrylyuk |
| collection | Open-Science |
| first_indexed | 2025-07-22T08:14:31Z |
| format | Article |
| id | open-sciencenbuvgovua-77625 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T08:14:31Z |
| publishDate | 2014 |
| record_format | dspace |
| series | Ukrainian Journal of Physics |
| spelling | open-sciencenbuvgovua-776252024-04-16T17:43:44Z Study of the distribution of temperature profiles in nonstoichiometric SiOx films at laser annealing O. O. Gavrylyuk Yu. Semchuk O. V. Steblova A. A. Evtukh L. L. Fedorenko 0372-400X 2014 en Ukrainian Journal of Physics http://jnas.nbuv.gov.ua/article/UJRN-0000726343 Article |
| spellingShingle | Ukrainian Journal of Physics O. O. Gavrylyuk Yu. Semchuk O. V. Steblova A. A. Evtukh L. L. Fedorenko Study of the distribution of temperature profiles in nonstoichiometric SiOx films at laser annealing |
| title | Study of the distribution of temperature profiles in nonstoichiometric SiOx films at laser annealing |
| title_full | Study of the distribution of temperature profiles in nonstoichiometric SiOx films at laser annealing |
| title_fullStr | Study of the distribution of temperature profiles in nonstoichiometric SiOx films at laser annealing |
| title_full_unstemmed | Study of the distribution of temperature profiles in nonstoichiometric SiOx films at laser annealing |
| title_short | Study of the distribution of temperature profiles in nonstoichiometric SiOx films at laser annealing |
| title_sort | study of the distribution of temperature profiles in nonstoichiometric siox films at laser annealing |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000726343 |
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