Evolution of structure and mechanism of thermal decomposition of C/Si multilayers

Evolution of structure and mechanism of thermal decomposition of C/Si multilayers

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Bibliographic Details
Date:2014
Main Authors: I. A. Zhuravel, E. A. Bugaev, A. V. Penkov, E. N. Zubarev, V. A. Sevrjukova, V. V. Kondratenko
Format: Article
Language:English
Published: 2014
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000971639
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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-79210
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spelling open-sciencenbuvgovua-792102024-04-16T17:54:50Z Evolution of structure and mechanism of thermal decomposition of C/Si multilayers I. A. Zhuravel E. A. Bugaev A. V. Penkov E. N. Zubarev V. A. Sevrjukova V. V. Kondratenko 1999-8074 2014 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000971639 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
I. A. Zhuravel
E. A. Bugaev
A. V. Penkov
E. N. Zubarev
V. A. Sevrjukova
V. V. Kondratenko
Evolution of structure and mechanism of thermal decomposition of C/Si multilayers
format Article
author I. A. Zhuravel
E. A. Bugaev
A. V. Penkov
E. N. Zubarev
V. A. Sevrjukova
V. V. Kondratenko
author_facet I. A. Zhuravel
E. A. Bugaev
A. V. Penkov
E. N. Zubarev
V. A. Sevrjukova
V. V. Kondratenko
author_sort I. A. Zhuravel
title Evolution of structure and mechanism of thermal decomposition of C/Si multilayers
title_short Evolution of structure and mechanism of thermal decomposition of C/Si multilayers
title_full Evolution of structure and mechanism of thermal decomposition of C/Si multilayers
title_fullStr Evolution of structure and mechanism of thermal decomposition of C/Si multilayers
title_full_unstemmed Evolution of structure and mechanism of thermal decomposition of C/Si multilayers
title_sort evolution of structure and mechanism of thermal decomposition of c/si multilayers
publishDate 2014
url http://jnas.nbuv.gov.ua/article/UJRN-0000971639
work_keys_str_mv AT iazhuravel evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers
AT eabugaev evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers
AT avpenkov evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers
AT enzubarev evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers
AT vasevrjukova evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers
AT vvkondratenko evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers
first_indexed 2025-07-22T08:40:33Z
last_indexed 2025-07-22T08:40:33Z
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