Evolution of structure and mechanism of thermal decomposition of C/Si multilayers
Збережено в:
| Дата: | 2014 |
|---|---|
| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2014
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000971639 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-79210 |
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open-sciencenbuvgovua-792102024-04-16T17:54:50Z Evolution of structure and mechanism of thermal decomposition of C/Si multilayers I. A. Zhuravel E. A. Bugaev A. V. Penkov E. N. Zubarev V. A. Sevrjukova V. V. Kondratenko 1999-8074 2014 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000971639 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering I. A. Zhuravel E. A. Bugaev A. V. Penkov E. N. Zubarev V. A. Sevrjukova V. V. Kondratenko Evolution of structure and mechanism of thermal decomposition of C/Si multilayers |
| format |
Article |
| author |
I. A. Zhuravel E. A. Bugaev A. V. Penkov E. N. Zubarev V. A. Sevrjukova V. V. Kondratenko |
| author_facet |
I. A. Zhuravel E. A. Bugaev A. V. Penkov E. N. Zubarev V. A. Sevrjukova V. V. Kondratenko |
| author_sort |
I. A. Zhuravel |
| title |
Evolution of structure and mechanism of thermal decomposition of C/Si multilayers |
| title_short |
Evolution of structure and mechanism of thermal decomposition of C/Si multilayers |
| title_full |
Evolution of structure and mechanism of thermal decomposition of C/Si multilayers |
| title_fullStr |
Evolution of structure and mechanism of thermal decomposition of C/Si multilayers |
| title_full_unstemmed |
Evolution of structure and mechanism of thermal decomposition of C/Si multilayers |
| title_sort |
evolution of structure and mechanism of thermal decomposition of c/si multilayers |
| publishDate |
2014 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000971639 |
| work_keys_str_mv |
AT iazhuravel evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers AT eabugaev evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers AT avpenkov evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers AT enzubarev evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers AT vasevrjukova evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers AT vvkondratenko evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers |
| first_indexed |
2024-04-17T05:40:57Z |
| last_indexed |
2024-04-17T05:40:57Z |
| _version_ |
1796885542850265088 |