Evolution of structure and mechanism of thermal decomposition of C/Si multilayers
Збережено в:
| Дата: | 2014 |
|---|---|
| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2014
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000971639 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859534988997820416 |
|---|---|
| author | I. A. Zhuravel E. A. Bugaev A. V. Penkov E. N. Zubarev V. A. Sevrjukova V. V. Kondratenko |
| author_facet | I. A. Zhuravel E. A. Bugaev A. V. Penkov E. N. Zubarev V. A. Sevrjukova V. V. Kondratenko |
| author_sort | I. A. Zhuravel |
| collection | Open-Science |
| first_indexed | 2025-07-22T08:40:33Z |
| format | Article |
| id | open-sciencenbuvgovua-79210 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T08:40:33Z |
| publishDate | 2014 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-792102024-04-16T17:54:50Z Evolution of structure and mechanism of thermal decomposition of C/Si multilayers I. A. Zhuravel E. A. Bugaev A. V. Penkov E. N. Zubarev V. A. Sevrjukova V. V. Kondratenko 1999-8074 2014 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000971639 Article |
| spellingShingle | Physical surface engineering I. A. Zhuravel E. A. Bugaev A. V. Penkov E. N. Zubarev V. A. Sevrjukova V. V. Kondratenko Evolution of structure and mechanism of thermal decomposition of C/Si multilayers |
| title | Evolution of structure and mechanism of thermal decomposition of C/Si multilayers |
| title_full | Evolution of structure and mechanism of thermal decomposition of C/Si multilayers |
| title_fullStr | Evolution of structure and mechanism of thermal decomposition of C/Si multilayers |
| title_full_unstemmed | Evolution of structure and mechanism of thermal decomposition of C/Si multilayers |
| title_short | Evolution of structure and mechanism of thermal decomposition of C/Si multilayers |
| title_sort | evolution of structure and mechanism of thermal decomposition of c/si multilayers |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000971639 |
| work_keys_str_mv | AT iazhuravel evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers AT eabugaev evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers AT avpenkov evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers AT enzubarev evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers AT vasevrjukova evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers AT vvkondratenko evolutionofstructureandmechanismofthermaldecompositionofcsimultilayers |