APA (7th ed.) Citation

Yakovin, S. D., Zykov, O. V., Dudin, S. V., Farenik, V. I., & Yunakov, M. M. (2014). Ion-plasma system for reactive magnetron deposition.

Chicago Style (17th ed.) Citation

Yakovin, S. D., O. V. Zykov, S. V. Dudin, V. I. Farenik, and M. M. Yunakov. Ion-plasma System for Reactive Magnetron Deposition. 2014.

MLA (8th ed.) Citation

Yakovin, S. D., et al. Ion-plasma System for Reactive Magnetron Deposition. 2014.

Warning: These citations may not always be 100% accurate.