Ion-plasma system for reactive magnetron deposition

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Datum:2014
Hauptverfasser: S. D. Yakovin, O. V. Zykov, S. V. Dudin, V. I. Farenik, M. M. Yunakov
Format: Artikel
Sprache:English
Veröffentlicht: 2014
Schriftenreihe:Physical surface engineering
Online Zugang:http://jnas.nbuv.gov.ua/article/UJRN-0001030980
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-793112024-04-16T17:55:38Z Ion-plasma system for reactive magnetron deposition S. D. Yakovin O. V. Zykov S. V. Dudin V. I. Farenik M. M. Yunakov 1999-8074 2014 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0001030980 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
S. D. Yakovin
O. V. Zykov
S. V. Dudin
V. I. Farenik
M. M. Yunakov
Ion-plasma system for reactive magnetron deposition
format Article
author S. D. Yakovin
O. V. Zykov
S. V. Dudin
V. I. Farenik
M. M. Yunakov
author_facet S. D. Yakovin
O. V. Zykov
S. V. Dudin
V. I. Farenik
M. M. Yunakov
author_sort S. D. Yakovin
title Ion-plasma system for reactive magnetron deposition
title_short Ion-plasma system for reactive magnetron deposition
title_full Ion-plasma system for reactive magnetron deposition
title_fullStr Ion-plasma system for reactive magnetron deposition
title_full_unstemmed Ion-plasma system for reactive magnetron deposition
title_sort ion-plasma system for reactive magnetron deposition
publishDate 2014
url http://jnas.nbuv.gov.ua/article/UJRN-0001030980
work_keys_str_mv AT sdyakovin ionplasmasystemforreactivemagnetrondeposition
AT ovzykov ionplasmasystemforreactivemagnetrondeposition
AT svdudin ionplasmasystemforreactivemagnetrondeposition
AT vifarenik ionplasmasystemforreactivemagnetrondeposition
AT mmyunakov ionplasmasystemforreactivemagnetrondeposition
first_indexed 2025-07-22T08:42:38Z
last_indexed 2025-07-22T08:42:38Z
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