Ion-plasma system for reactive magnetron deposition
Збережено в:
| Дата: | 2014 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2014
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001030980 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-79311 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-793112024-04-16T17:55:38Z Ion-plasma system for reactive magnetron deposition S. D. Yakovin O. V. Zykov S. V. Dudin V. I. Farenik M. M. Yunakov 1999-8074 2014 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0001030980 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering S. D. Yakovin O. V. Zykov S. V. Dudin V. I. Farenik M. M. Yunakov Ion-plasma system for reactive magnetron deposition |
| format |
Article |
| author |
S. D. Yakovin O. V. Zykov S. V. Dudin V. I. Farenik M. M. Yunakov |
| author_facet |
S. D. Yakovin O. V. Zykov S. V. Dudin V. I. Farenik M. M. Yunakov |
| author_sort |
S. D. Yakovin |
| title |
Ion-plasma system for reactive magnetron deposition |
| title_short |
Ion-plasma system for reactive magnetron deposition |
| title_full |
Ion-plasma system for reactive magnetron deposition |
| title_fullStr |
Ion-plasma system for reactive magnetron deposition |
| title_full_unstemmed |
Ion-plasma system for reactive magnetron deposition |
| title_sort |
ion-plasma system for reactive magnetron deposition |
| publishDate |
2014 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001030980 |
| work_keys_str_mv |
AT sdyakovin ionplasmasystemforreactivemagnetrondeposition AT ovzykov ionplasmasystemforreactivemagnetrondeposition AT svdudin ionplasmasystemforreactivemagnetrondeposition AT vifarenik ionplasmasystemforreactivemagnetrondeposition AT mmyunakov ionplasmasystemforreactivemagnetrondeposition |
| first_indexed |
2025-07-22T08:42:38Z |
| last_indexed |
2025-07-22T08:42:38Z |
| _version_ |
1850419652645093376 |