Ion-plasma system for reactive magnetron deposition
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| Date: | 2014 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2014
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| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001030980 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859535077465128961 |
|---|---|
| author | S. D. Yakovin O. V. Zykov S. V. Dudin V. I. Farenik M. M. Yunakov |
| author_facet | S. D. Yakovin O. V. Zykov S. V. Dudin V. I. Farenik M. M. Yunakov |
| author_sort | S. D. Yakovin |
| collection | Open-Science |
| first_indexed | 2025-07-22T08:42:38Z |
| format | Article |
| id | open-sciencenbuvgovua-79311 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T08:42:38Z |
| publishDate | 2014 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-793112024-04-16T17:55:38Z Ion-plasma system for reactive magnetron deposition S. D. Yakovin O. V. Zykov S. V. Dudin V. I. Farenik M. M. Yunakov 1999-8074 2014 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0001030980 Article |
| spellingShingle | Physical surface engineering S. D. Yakovin O. V. Zykov S. V. Dudin V. I. Farenik M. M. Yunakov Ion-plasma system for reactive magnetron deposition |
| title | Ion-plasma system for reactive magnetron deposition |
| title_full | Ion-plasma system for reactive magnetron deposition |
| title_fullStr | Ion-plasma system for reactive magnetron deposition |
| title_full_unstemmed | Ion-plasma system for reactive magnetron deposition |
| title_short | Ion-plasma system for reactive magnetron deposition |
| title_sort | ion-plasma system for reactive magnetron deposition |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001030980 |
| work_keys_str_mv | AT sdyakovin ionplasmasystemforreactivemagnetrondeposition AT ovzykov ionplasmasystemforreactivemagnetrondeposition AT svdudin ionplasmasystemforreactivemagnetrondeposition AT vifarenik ionplasmasystemforreactivemagnetrondeposition AT mmyunakov ionplasmasystemforreactivemagnetrondeposition |