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Ion-plasma system for reactive magnetron deposition

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Bibliographic Details
Date:	2014
Main Authors:	S. D. Yakovin, O. V. Zykov, S. V. Dudin, V. I. Farenik, M. M. Yunakov
Format:	Article
Language:	English
Published:	2014
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001030980
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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