Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals
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| Datum: | 2014 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2014
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| Schriftenreihe: | Physical surface engineering |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0001031073 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-793322024-04-16T17:55:49Z Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals A. V. Sagalovich V. V. Sagalovich S. V. Dudin V. I. Farenik 1999-8074 2014 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0001031073 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering A. V. Sagalovich V. V. Sagalovich S. V. Dudin V. I. Farenik Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals |
| format |
Article |
| author |
A. V. Sagalovich V. V. Sagalovich S. V. Dudin V. I. Farenik |
| author_facet |
A. V. Sagalovich V. V. Sagalovich S. V. Dudin V. I. Farenik |
| author_sort |
A. V. Sagalovich |
| title |
Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals |
| title_short |
Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals |
| title_full |
Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals |
| title_fullStr |
Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals |
| title_full_unstemmed |
Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals |
| title_sort |
comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals |
| publishDate |
2014 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001031073 |
| work_keys_str_mv |
AT avsagalovich comparativeanalysisofdifferentplasmasourcesforreactivedepositionofcoatingsanddiffusionsaturationofmetals AT vvsagalovich comparativeanalysisofdifferentplasmasourcesforreactivedepositionofcoatingsanddiffusionsaturationofmetals AT svdudin comparativeanalysisofdifferentplasmasourcesforreactivedepositionofcoatingsanddiffusionsaturationofmetals AT vifarenik comparativeanalysisofdifferentplasmasourcesforreactivedepositionofcoatingsanddiffusionsaturationofmetals |
| first_indexed |
2025-07-22T08:43:55Z |
| last_indexed |
2025-07-22T08:43:55Z |
| _version_ |
1850419654869123072 |