Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals

Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals

Saved in:
Bibliographic Details
Date:2014
Main Authors: A. V. Sagalovich, V. V. Sagalovich, S. V. Dudin, V. I. Farenik
Format: Article
Language:English
Published: 2014
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001031073
Tags: Add Tag
No Tags, Be the first to tag this record!
Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

Institution

Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-79332
record_format dspace
spelling open-sciencenbuvgovua-793322024-04-16T17:55:49Z Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals A. V. Sagalovich V. V. Sagalovich S. V. Dudin V. I. Farenik 1999-8074 2014 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0001031073 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
A. V. Sagalovich
V. V. Sagalovich
S. V. Dudin
V. I. Farenik
Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals
format Article
author A. V. Sagalovich
V. V. Sagalovich
S. V. Dudin
V. I. Farenik
author_facet A. V. Sagalovich
V. V. Sagalovich
S. V. Dudin
V. I. Farenik
author_sort A. V. Sagalovich
title Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals
title_short Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals
title_full Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals
title_fullStr Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals
title_full_unstemmed Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals
title_sort comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals
publishDate 2014
url http://jnas.nbuv.gov.ua/article/UJRN-0001031073
work_keys_str_mv AT avsagalovich comparativeanalysisofdifferentplasmasourcesforreactivedepositionofcoatingsanddiffusionsaturationofmetals
AT vvsagalovich comparativeanalysisofdifferentplasmasourcesforreactivedepositionofcoatingsanddiffusionsaturationofmetals
AT svdudin comparativeanalysisofdifferentplasmasourcesforreactivedepositionofcoatingsanddiffusionsaturationofmetals
AT vifarenik comparativeanalysisofdifferentplasmasourcesforreactivedepositionofcoatingsanddiffusionsaturationofmetals
first_indexed 2025-07-22T08:43:55Z
last_indexed 2025-07-22T08:43:55Z
_version_ 1850419654869123072

Similar Items