Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals
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| Date: | 2014 |
|---|---|
| Main Authors: | A. V. Sagalovich, V. V. Sagalovich, S. V. Dudin, V. I. Farenik |
| Format: | Article |
| Language: | English |
| Published: |
2014
|
| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001031073 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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