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Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals

Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals

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Bibliographic Details
Main Authors: A. V. Sagalovich, V. V. Sagalovich, S. V. Dudin, V. I. Farenik
Format: Article
Language:English
Published: 2014
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001031073
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