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Low-temperature deposition of silicon dioxide films in high-density plasma

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Bibliographic Details
Date:	2013
Main Authors:	A. Yasunas, D. Kotov, V. Shiripov, U. Radzionay
Format:	Article
Language:	English
Published:	2013
Series:	Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000351896
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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