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The source of macroparticle-free plasma flows for nanoelectronics

The source of macroparticle-free plasma flows for nanoelectronics

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Bibliographic Details
Main Author: A. G. Borisenko
Format: Article
Language:English
Published: 2013
Series:Technology and design in electronic equipment
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000405026
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record_format dspace
spelling open-sciencenbuvgovua-845122024-04-16T18:39:12Z The source of macroparticle-free plasma flows for nanoelectronics A. G. Borisenko 2225-5818 2013 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000405026 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Technology and design in electronic equipment
spellingShingle Technology and design in electronic equipment
A. G. Borisenko
The source of macroparticle-free plasma flows for nanoelectronics
format Article
author A. G. Borisenko
author_facet A. G. Borisenko
author_sort A. G. Borisenko
title The source of macroparticle-free plasma flows for nanoelectronics
title_short The source of macroparticle-free plasma flows for nanoelectronics
title_full The source of macroparticle-free plasma flows for nanoelectronics
title_fullStr The source of macroparticle-free plasma flows for nanoelectronics
title_full_unstemmed The source of macroparticle-free plasma flows for nanoelectronics
title_sort source of macroparticle-free plasma flows for nanoelectronics
publishDate 2013
url http://jnas.nbuv.gov.ua/article/UJRN-0000405026
work_keys_str_mv AT agborisenko thesourceofmacroparticlefreeplasmaflowsfornanoelectronics
AT agborisenko sourceofmacroparticlefreeplasmaflowsfornanoelectronics
first_indexed 2024-04-17T06:02:27Z
last_indexed 2024-04-17T06:02:27Z
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