The source of macroparticle-free plasma flows for nanoelectronics
Збережено в:
| Дата: | 2013 |
|---|---|
| Автор: | |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2013
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| Назва видання: | Technology and design in electronic equipment |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000405026 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-84512 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-845122024-04-16T18:39:12Z The source of macroparticle-free plasma flows for nanoelectronics A. G. Borisenko 2225-5818 2013 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000405026 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Technology and design in electronic equipment |
| spellingShingle |
Technology and design in electronic equipment A. G. Borisenko The source of macroparticle-free plasma flows for nanoelectronics |
| format |
Article |
| author |
A. G. Borisenko |
| author_facet |
A. G. Borisenko |
| author_sort |
A. G. Borisenko |
| title |
The source of macroparticle-free plasma flows for nanoelectronics |
| title_short |
The source of macroparticle-free plasma flows for nanoelectronics |
| title_full |
The source of macroparticle-free plasma flows for nanoelectronics |
| title_fullStr |
The source of macroparticle-free plasma flows for nanoelectronics |
| title_full_unstemmed |
The source of macroparticle-free plasma flows for nanoelectronics |
| title_sort |
source of macroparticle-free plasma flows for nanoelectronics |
| publishDate |
2013 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000405026 |
| work_keys_str_mv |
AT agborisenko thesourceofmacroparticlefreeplasmaflowsfornanoelectronics AT agborisenko sourceofmacroparticlefreeplasmaflowsfornanoelectronics |
| first_indexed |
2024-04-17T06:02:27Z |
| last_indexed |
2024-04-17T06:02:27Z |
| _version_ |
1796886096660922368 |