Vasilenko, N. A., & Vasilenko, A. O. (2013). Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods.
Chicago-Zitierstil (17. Ausg.)Vasilenko, N. A., und A. O. Vasilenko. Comparison of Physicochemical Properties of Nitride Films Produced by Various Reactive Sputtering Methods. 2013.
MLA-Zitierstil (8. Ausg.)Vasilenko, N. A., und A. O. Vasilenko. Comparison of Physicochemical Properties of Nitride Films Produced by Various Reactive Sputtering Methods. 2013.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.