APA (7th ed.) Citation

Vasilenko, N. A., & Vasilenko, A. O. (2013). Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods.

Chicago Style (17th ed.) Citation

Vasilenko, N. A., and A. O. Vasilenko. Comparison of Physicochemical Properties of Nitride Films Produced by Various Reactive Sputtering Methods. 2013.

MLA (8th ed.) Citation

Vasilenko, N. A., and A. O. Vasilenko. Comparison of Physicochemical Properties of Nitride Films Produced by Various Reactive Sputtering Methods. 2013.

Warning: These citations may not always be 100% accurate.