Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods
Збережено в:
| Дата: | 2013 |
|---|---|
| Автори: | , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2013
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| Назва видання: | Journal of mechanical engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000450102 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859539606617194496 |
|---|---|
| author | N. A. Vasilenko A. O. Vasilenko |
| author_facet | N. A. Vasilenko A. O. Vasilenko |
| author_sort | N. A. Vasilenko |
| collection | Open-Science |
| first_indexed | 2025-07-22T10:29:48Z |
| format | Article |
| id | open-sciencenbuvgovua-84995 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T10:29:48Z |
| publishDate | 2013 |
| record_format | dspace |
| series | Journal of mechanical engineering |
| spelling | open-sciencenbuvgovua-849952024-04-16T18:42:09Z Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods N. A. Vasilenko A. O. Vasilenko 0131-2928 2013 en Journal of mechanical engineering http://jnas.nbuv.gov.ua/article/UJRN-0000450102 Article |
| spellingShingle | Journal of mechanical engineering N. A. Vasilenko A. O. Vasilenko Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
| title | Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
| title_full | Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
| title_fullStr | Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
| title_full_unstemmed | Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
| title_short | Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
| title_sort | comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000450102 |
| work_keys_str_mv | AT navasilenko comparisonofphysicochemicalpropertiesofnitridefilmsproducedbyvariousreactivesputteringmethods AT aovasilenko comparisonofphysicochemicalpropertiesofnitridefilmsproducedbyvariousreactivesputteringmethods |