Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods
Збережено в:
Дата: | 2013 |
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Автори: | , |
Формат: | Стаття |
Мова: | English |
Опубліковано: |
2013
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Назва видання: | Journal of mechanical engineering |
Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000450102 |
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Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-849952024-04-16T18:42:09Z Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods N. A. Vasilenko A. O. Vasilenko 0131-2928 2013 en Journal of mechanical engineering http://jnas.nbuv.gov.ua/article/UJRN-0000450102 Article |
institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
collection |
Open-Science |
language |
English |
series |
Journal of mechanical engineering |
spellingShingle |
Journal of mechanical engineering N. A. Vasilenko A. O. Vasilenko Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
format |
Article |
author |
N. A. Vasilenko A. O. Vasilenko |
author_facet |
N. A. Vasilenko A. O. Vasilenko |
author_sort |
N. A. Vasilenko |
title |
Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
title_short |
Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
title_full |
Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
title_fullStr |
Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
title_full_unstemmed |
Comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
title_sort |
comparison of physicochemical properties of nitride films produced by various reactive sputtering methods |
publishDate |
2013 |
url |
http://jnas.nbuv.gov.ua/article/UJRN-0000450102 |
work_keys_str_mv |
AT navasilenko comparisonofphysicochemicalpropertiesofnitridefilmsproducedbyvariousreactivesputteringmethods AT aovasilenko comparisonofphysicochemicalpropertiesofnitridefilmsproducedbyvariousreactivesputteringmethods |
first_indexed |
2024-04-17T06:04:26Z |
last_indexed |
2024-04-17T06:04:26Z |
_version_ |
1796886147121545216 |