Temperature and laser annealing of nonstoichiometric SiOx films
Збережено в:
| Дата: | 2013 |
|---|---|
| Автори: | , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2013
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| Назва видання: | Surface |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000516567 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-85788 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-857882024-04-16T18:47:46Z Temperature and laser annealing of nonstoichiometric SiOx films O. O. Havryliuk Yu. Semchuk 2617-5975 2013 en Surface http://jnas.nbuv.gov.ua/article/UJRN-0000516567 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Surface |
| spellingShingle |
Surface O. O. Havryliuk Yu. Semchuk Temperature and laser annealing of nonstoichiometric SiOx films |
| format |
Article |
| author |
O. O. Havryliuk Yu. Semchuk |
| author_facet |
O. O. Havryliuk Yu. Semchuk |
| author_sort |
O. O. Havryliuk |
| title |
Temperature and laser annealing of nonstoichiometric SiOx films |
| title_short |
Temperature and laser annealing of nonstoichiometric SiOx films |
| title_full |
Temperature and laser annealing of nonstoichiometric SiOx films |
| title_fullStr |
Temperature and laser annealing of nonstoichiometric SiOx films |
| title_full_unstemmed |
Temperature and laser annealing of nonstoichiometric SiOx films |
| title_sort |
temperature and laser annealing of nonstoichiometric siox films |
| publishDate |
2013 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000516567 |
| work_keys_str_mv |
AT oohavryliuk temperatureandlaserannealingofnonstoichiometricsioxfilms AT yusemchuk temperatureandlaserannealingofnonstoichiometricsioxfilms |
| first_indexed |
2024-04-17T06:07:40Z |
| last_indexed |
2024-04-17T06:07:40Z |
| _version_ |
1796886230280962048 |