Temperature and laser annealing of nonstoichiometric SiOx films
Збережено в:
| Дата: | 2013 |
|---|---|
| Автори: | , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2013
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| Назва видання: | Surface |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000516567 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859540136398684160 |
|---|---|
| author | O. O. Havryliuk Yu. Semchuk |
| author_facet | O. O. Havryliuk Yu. Semchuk |
| author_sort | O. O. Havryliuk |
| collection | Open-Science |
| first_indexed | 2025-07-22T10:46:16Z |
| format | Article |
| id | open-sciencenbuvgovua-85788 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T10:46:16Z |
| publishDate | 2013 |
| record_format | dspace |
| series | Surface |
| spelling | open-sciencenbuvgovua-857882024-04-16T18:47:46Z Temperature and laser annealing of nonstoichiometric SiOx films O. O. Havryliuk Yu. Semchuk 2617-5975 2013 en Surface http://jnas.nbuv.gov.ua/article/UJRN-0000516567 Article |
| spellingShingle | Surface O. O. Havryliuk Yu. Semchuk Temperature and laser annealing of nonstoichiometric SiOx films |
| title | Temperature and laser annealing of nonstoichiometric SiOx films |
| title_full | Temperature and laser annealing of nonstoichiometric SiOx films |
| title_fullStr | Temperature and laser annealing of nonstoichiometric SiOx films |
| title_full_unstemmed | Temperature and laser annealing of nonstoichiometric SiOx films |
| title_short | Temperature and laser annealing of nonstoichiometric SiOx films |
| title_sort | temperature and laser annealing of nonstoichiometric siox films |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000516567 |
| work_keys_str_mv | AT oohavryliuk temperatureandlaserannealingofnonstoichiometricsioxfilms AT yusemchuk temperatureandlaserannealingofnonstoichiometricsioxfilms |