Investigation of the Phase Interfaces in Periodic Multilayer Mo/Si Structures, Using the Method of Mass-Spectrometry of Neutral Particles - Ju. P. Pershin; V. A. Sevrjukova; E. N. Zubarev; A. S. Oberemok; V. P. Melnik; B. N. Romanjuk; V. G. Popov; P. M. Litvin (Metallophysics and advanced technologies, 2013)