Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation
Збережено в:
| Дата: | 2013 |
|---|---|
| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2013
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| Назва видання: | Ukrainian journal of physics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000690899 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-87146 |
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| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-871462024-04-16T18:56:02Z Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation B. V. Pavlyk M. O. Kushlyk R. I. Didyk Y. A. Shykorjak D. P. Slobodzyan B. Y. Kulyk 2071-0186 2013 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0000690899 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Ukrainian journal of physics |
| spellingShingle |
Ukrainian journal of physics B. V. Pavlyk M. O. Kushlyk R. I. Didyk Y. A. Shykorjak D. P. Slobodzyan B. Y. Kulyk Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation |
| format |
Article |
| author |
B. V. Pavlyk M. O. Kushlyk R. I. Didyk Y. A. Shykorjak D. P. Slobodzyan B. Y. Kulyk |
| author_facet |
B. V. Pavlyk M. O. Kushlyk R. I. Didyk Y. A. Shykorjak D. P. Slobodzyan B. Y. Kulyk |
| author_sort |
B. V. Pavlyk |
| title |
Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation |
| title_short |
Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation |
| title_full |
Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation |
| title_fullStr |
Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation |
| title_full_unstemmed |
Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation |
| title_sort |
electrophysical characteristics of near-surface layers in p-si crystals with sputtered al films and subjected to elastic deformation |
| publishDate |
2013 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000690899 |
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2024-04-17T06:13:34Z |
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