Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation

Збережено в:
Бібліографічні деталі
Дата:2013
Автори: B. V. Pavlyk, M. O. Kushlyk, R. I. Didyk, Y. A. Shykorjak, D. P. Slobodzyan, B. Y. Kulyk
Формат: Стаття
Мова:English
Опубліковано: 2013
Назва видання:Ukrainian journal of physics
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0000690899
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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-87146
record_format dspace
spelling open-sciencenbuvgovua-871462024-04-16T18:56:02Z Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation B. V. Pavlyk M. O. Kushlyk R. I. Didyk Y. A. Shykorjak D. P. Slobodzyan B. Y. Kulyk 2071-0186 2013 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0000690899 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Ukrainian journal of physics
spellingShingle Ukrainian journal of physics
B. V. Pavlyk
M. O. Kushlyk
R. I. Didyk
Y. A. Shykorjak
D. P. Slobodzyan
B. Y. Kulyk
Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation
format Article
author B. V. Pavlyk
M. O. Kushlyk
R. I. Didyk
Y. A. Shykorjak
D. P. Slobodzyan
B. Y. Kulyk
author_facet B. V. Pavlyk
M. O. Kushlyk
R. I. Didyk
Y. A. Shykorjak
D. P. Slobodzyan
B. Y. Kulyk
author_sort B. V. Pavlyk
title Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation
title_short Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation
title_full Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation
title_fullStr Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation
title_full_unstemmed Electrophysical characteristics of near-surface layers in p-Si crystals with sputtered Al films and subjected to elastic deformation
title_sort electrophysical characteristics of near-surface layers in p-si crystals with sputtered al films and subjected to elastic deformation
publishDate 2013
url http://jnas.nbuv.gov.ua/article/UJRN-0000690899
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AT mokushlyk electrophysicalcharacteristicsofnearsurfacelayersinpsicrystalswithsputteredalfilmsandsubjectedtoelasticdeformation
AT rididyk electrophysicalcharacteristicsofnearsurfacelayersinpsicrystalswithsputteredalfilmsandsubjectedtoelasticdeformation
AT yashykorjak electrophysicalcharacteristicsofnearsurfacelayersinpsicrystalswithsputteredalfilmsandsubjectedtoelasticdeformation
AT dpslobodzyan electrophysicalcharacteristicsofnearsurfacelayersinpsicrystalswithsputteredalfilmsandsubjectedtoelasticdeformation
AT bykulyk electrophysicalcharacteristicsofnearsurfacelayersinpsicrystalswithsputteredalfilmsandsubjectedtoelasticdeformation
first_indexed 2024-04-17T06:13:34Z
last_indexed 2024-04-17T06:13:34Z
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