Influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target Si with 1-keV Ar ions

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Бібліографічні деталі
Дата:2013
Автор: A. A. Gubarev
Формат: Стаття
Мова:English
Опубліковано: 2013
Назва видання:Physical surface engineering
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0000927290
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-88836
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spelling open-sciencenbuvgovua-888362024-04-16T19:27:38Z Influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target Si with 1-keV Ar ions A. A. Gubarev 1999-8074 2013 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000927290 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
A. A. Gubarev
Influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target Si with 1-keV Ar ions
format Article
author A. A. Gubarev
author_facet A. A. Gubarev
author_sort A. A. Gubarev
title Influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target Si with 1-keV Ar ions
title_short Influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target Si with 1-keV Ar ions
title_full Influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target Si with 1-keV Ar ions
title_fullStr Influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target Si with 1-keV Ar ions
title_full_unstemmed Influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target Si with 1-keV Ar ions
title_sort influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target si with 1-kev ar ions
publishDate 2013
url http://jnas.nbuv.gov.ua/article/UJRN-0000927290
work_keys_str_mv AT aagubarev influenceofthedistributionofscattersofknockedoutatomsinacascadeofcollisionsontheformationofareliefuponirradiationofanamorphoustargetsiwith1kevarions
first_indexed 2024-04-17T06:20:28Z
last_indexed 2024-04-17T06:20:28Z
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