Influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target Si with 1-keV Ar ions
Збережено в:
Дата: | 2013 |
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Автор: | |
Формат: | Стаття |
Мова: | English |
Опубліковано: |
2013
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Назва видання: | Physical surface engineering |
Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000927290 |
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Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-888362024-04-16T19:27:38Z Influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target Si with 1-keV Ar ions A. A. Gubarev 1999-8074 2013 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000927290 Article |
institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
collection |
Open-Science |
language |
English |
series |
Physical surface engineering |
spellingShingle |
Physical surface engineering A. A. Gubarev Influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target Si with 1-keV Ar ions |
format |
Article |
author |
A. A. Gubarev |
author_facet |
A. A. Gubarev |
author_sort |
A. A. Gubarev |
title |
Influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target Si with 1-keV Ar ions |
title_short |
Influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target Si with 1-keV Ar ions |
title_full |
Influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target Si with 1-keV Ar ions |
title_fullStr |
Influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target Si with 1-keV Ar ions |
title_full_unstemmed |
Influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target Si with 1-keV Ar ions |
title_sort |
influence of the distribution of scatters of knocked-out atoms in a cascade of collisions on the formation of a relief upon irradiation of an amorphous target si with 1-kev ar ions |
publishDate |
2013 |
url |
http://jnas.nbuv.gov.ua/article/UJRN-0000927290 |
work_keys_str_mv |
AT aagubarev influenceofthedistributionofscattersofknockedoutatomsinacascadeofcollisionsontheformationofareliefuponirradiationofanamorphoustargetsiwith1kevarions |
first_indexed |
2024-04-17T06:20:28Z |
last_indexed |
2024-04-17T06:20:28Z |
_version_ |
1796886548723007488 |