Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2

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Date:	2013
Main Authors:	I. N. Torianik, V. M. Beresnev, A. D. Pogrebnjak, O. V. Sobol, Ye. V. Beresneva, I. A. Podcherniaieva, Yu. Kropotov, N. G. Stiervoiedov, P. V. Turbin, D. A. Kolesnikov
Format:	Article
Language:	English
Published:	2013
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000928882
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Library portal of National Academy of Sciences of Ukraine | LibNAS

id	open-sciencenbuvgovua-88869
record_format	dspace
spelling	open-sciencenbuvgovua-888692024-04-16T19:27:53Z Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2 I. N. Torianik V. M. Beresnev A. D. Pogrebnjak O. V. Sobol Ye. V. Beresneva I. A. Podcherniaieva Yu. Kropotov N. G. Stiervoiedov P. V. Turbin D. A. Kolesnikov 1999-8074 2013 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000928882 Article
institution	Library portal of National Academy of Sciences of Ukraine \| LibNAS
collection	Open-Science
language	English
series	Physical surface engineering
spellingShingle	Physical surface engineering I. N. Torianik V. M. Beresnev A. D. Pogrebnjak O. V. Sobol Ye. V. Beresneva I. A. Podcherniaieva Yu. Kropotov N. G. Stiervoiedov P. V. Turbin D. A. Kolesnikov Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2
format	Article
author	I. N. Torianik V. M. Beresnev A. D. Pogrebnjak O. V. Sobol Ye. V. Beresneva I. A. Podcherniaieva Yu. Kropotov N. G. Stiervoiedov P. V. Turbin D. A. Kolesnikov
author_facet	I. N. Torianik V. M. Beresnev A. D. Pogrebnjak O. V. Sobol Ye. V. Beresneva I. A. Podcherniaieva Yu. Kropotov N. G. Stiervoiedov P. V. Turbin D. A. Kolesnikov
author_sort	I. N. Torianik
title	Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2
title_short	Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2
title_full	Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2
title_fullStr	Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2
title_full_unstemmed	Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2
title_sort	magnetron sputtering of high temperature composite ceramics aln-tib2-tisi2
publishDate	2013
url	http://jnas.nbuv.gov.ua/article/UJRN-0000928882
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first_indexed	2025-07-22T11:43:05Z
last_indexed	2025-07-22T11:43:05Z
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Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2

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