Magnetron sputtering of high temperature composite ceramics AlN-TiB2-TiSi2 - I. N. Torianik; V. M. Beresnev; A. D. Pogrebnjak; O. V. Sobol; Ye. V. Beresneva; I. A. Podcherniaieva; Yu. Kropotov; N. G. Stiervoiedov; P. V. Turbin; D. A. Kolesnikov (Physical surface engineering, 2013)