Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge
Збережено в:
| Дата: | 2021 |
|---|---|
| Автори: | , , , , , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2021
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| Назва видання: | Science and Innovation |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001320931 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-8917 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-89172024-02-25T16:10:41Z Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge Yu. V. Kovtun G. P. Glazunov V. E. Moiseenko S. M. Maznichenko M. N. Bondarenko A. L. Konotopskiy Y. V. Siusko I. K. Tarasov A. N. Shapoval A. V. Lozin 1815-2066 2021 en Science and Innovation http://jnas.nbuv.gov.ua/article/UJRN-0001320931 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Science and Innovation |
| spellingShingle |
Science and Innovation Yu. V. Kovtun G. P. Glazunov V. E. Moiseenko S. M. Maznichenko M. N. Bondarenko A. L. Konotopskiy Y. V. Siusko I. K. Tarasov A. N. Shapoval A. V. Lozin Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge |
| format |
Article |
| author |
Yu. V. Kovtun G. P. Glazunov V. E. Moiseenko S. M. Maznichenko M. N. Bondarenko A. L. Konotopskiy Y. V. Siusko I. K. Tarasov A. N. Shapoval A. V. Lozin |
| author_facet |
Yu. V. Kovtun G. P. Glazunov V. E. Moiseenko S. M. Maznichenko M. N. Bondarenko A. L. Konotopskiy Y. V. Siusko I. K. Tarasov A. N. Shapoval A. V. Lozin |
| author_sort |
Yu. V. Kovtun |
| title |
Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge |
| title_short |
Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge |
| title_full |
Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge |
| title_fullStr |
Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge |
| title_full_unstemmed |
Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge |
| title_sort |
development of technology for vacuum surface conditioning by rf plasma discharge combined with dc discharge |
| publishDate |
2021 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001320931 |
| work_keys_str_mv |
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| first_indexed |
2024-03-30T06:51:39Z |
| last_indexed |
2024-03-30T06:51:39Z |
| _version_ |
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