Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge
Збережено в:
| Дата: | 2021 |
|---|---|
| Автори: | , , , , , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2021
|
| Назва видання: | Science and Innovation |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001320931 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859491154540625920 |
|---|---|
| author | Yu. V. Kovtun G. P. Glazunov V. E. Moiseenko S. M. Maznichenko M. N. Bondarenko A. L. Konotopskiy Y. V. Siusko I. K. Tarasov A. N. Shapoval A. V. Lozin |
| author_facet | Yu. V. Kovtun G. P. Glazunov V. E. Moiseenko S. M. Maznichenko M. N. Bondarenko A. L. Konotopskiy Y. V. Siusko I. K. Tarasov A. N. Shapoval A. V. Lozin |
| author_sort | Yu. V. Kovtun |
| collection | Open-Science |
| first_indexed | 2025-07-17T11:47:22Z |
| format | Article |
| id | open-sciencenbuvgovua-8917 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T11:47:22Z |
| publishDate | 2021 |
| record_format | dspace |
| series | Science and Innovation |
| spelling | open-sciencenbuvgovua-89172024-02-25T16:10:41Z Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge Yu. V. Kovtun G. P. Glazunov V. E. Moiseenko S. M. Maznichenko M. N. Bondarenko A. L. Konotopskiy Y. V. Siusko I. K. Tarasov A. N. Shapoval A. V. Lozin 1815-2066 2021 en Science and Innovation http://jnas.nbuv.gov.ua/article/UJRN-0001320931 Article |
| spellingShingle | Science and Innovation Yu. V. Kovtun G. P. Glazunov V. E. Moiseenko S. M. Maznichenko M. N. Bondarenko A. L. Konotopskiy Y. V. Siusko I. K. Tarasov A. N. Shapoval A. V. Lozin Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge |
| title | Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge |
| title_full | Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge |
| title_fullStr | Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge |
| title_full_unstemmed | Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge |
| title_short | Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge |
| title_sort | development of technology for vacuum surface conditioning by rf plasma discharge combined with dc discharge |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001320931 |
| work_keys_str_mv | AT yuvkovtun developmentoftechnologyforvacuumsurfaceconditioningbyrfplasmadischargecombinedwithdcdischarge AT gpglazunov developmentoftechnologyforvacuumsurfaceconditioningbyrfplasmadischargecombinedwithdcdischarge AT vemoiseenko developmentoftechnologyforvacuumsurfaceconditioningbyrfplasmadischargecombinedwithdcdischarge AT smmaznichenko developmentoftechnologyforvacuumsurfaceconditioningbyrfplasmadischargecombinedwithdcdischarge AT mnbondarenko developmentoftechnologyforvacuumsurfaceconditioningbyrfplasmadischargecombinedwithdcdischarge AT alkonotopskiy developmentoftechnologyforvacuumsurfaceconditioningbyrfplasmadischargecombinedwithdcdischarge AT yvsiusko developmentoftechnologyforvacuumsurfaceconditioningbyrfplasmadischargecombinedwithdcdischarge AT iktarasov developmentoftechnologyforvacuumsurfaceconditioningbyrfplasmadischargecombinedwithdcdischarge AT anshapoval developmentoftechnologyforvacuumsurfaceconditioningbyrfplasmadischargecombinedwithdcdischarge AT avlozin developmentoftechnologyforvacuumsurfaceconditioningbyrfplasmadischargecombinedwithdcdischarge |