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Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge

Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge

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Bibliographic Details
Main Authors: Yu. V. Kovtun, G. P. Glazunov, V. E. Moiseenko, S. M. Maznichenko, M. N. Bondarenko, A. L. Konotopskiy, Y. V. Siusko, I. K. Tarasov, A. N. Shapoval, A. V. Lozin
Format: Article
Language:English
Published: 2021
Series:Science and Innovation
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001320931
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spelling open-sciencenbuvgovua-89172024-02-25T16:10:41Z Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge Yu. V. Kovtun G. P. Glazunov V. E. Moiseenko S. M. Maznichenko M. N. Bondarenko A. L. Konotopskiy Y. V. Siusko I. K. Tarasov A. N. Shapoval A. V. Lozin 1815-2066 2021 en Science and Innovation http://jnas.nbuv.gov.ua/article/UJRN-0001320931 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Science and Innovation
spellingShingle Science and Innovation
Yu. V. Kovtun
G. P. Glazunov
V. E. Moiseenko
S. M. Maznichenko
M. N. Bondarenko
A. L. Konotopskiy
Y. V. Siusko
I. K. Tarasov
A. N. Shapoval
A. V. Lozin
Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge
format Article
author Yu. V. Kovtun
G. P. Glazunov
V. E. Moiseenko
S. M. Maznichenko
M. N. Bondarenko
A. L. Konotopskiy
Y. V. Siusko
I. K. Tarasov
A. N. Shapoval
A. V. Lozin
author_facet Yu. V. Kovtun
G. P. Glazunov
V. E. Moiseenko
S. M. Maznichenko
M. N. Bondarenko
A. L. Konotopskiy
Y. V. Siusko
I. K. Tarasov
A. N. Shapoval
A. V. Lozin
author_sort Yu. V. Kovtun
title Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge
title_short Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge
title_full Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge
title_fullStr Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge
title_full_unstemmed Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge
title_sort development of technology for vacuum surface conditioning by rf plasma discharge combined with dc discharge
publishDate 2021
url http://jnas.nbuv.gov.ua/article/UJRN-0001320931
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AT vemoiseenko developmentoftechnologyforvacuumsurfaceconditioningbyrfplasmadischargecombinedwithdcdischarge
AT smmaznichenko developmentoftechnologyforvacuumsurfaceconditioningbyrfplasmadischargecombinedwithdcdischarge
AT mnbondarenko developmentoftechnologyforvacuumsurfaceconditioningbyrfplasmadischargecombinedwithdcdischarge
AT alkonotopskiy developmentoftechnologyforvacuumsurfaceconditioningbyrfplasmadischargecombinedwithdcdischarge
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AT iktarasov developmentoftechnologyforvacuumsurfaceconditioningbyrfplasmadischargecombinedwithdcdischarge
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first_indexed 2024-03-30T06:51:39Z
last_indexed 2024-03-30T06:51:39Z
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