Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge
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| Date: | 2021 |
|---|---|
| Main Authors: | Yu. V. Kovtun, G. P. Glazunov, V. E. Moiseenko, S. M. Maznichenko, M. N. Bondarenko, A. L. Konotopskiy, Y. V. Siusko, I. K. Tarasov, A. N. Shapoval, A. V. Lozin |
| Format: | Article |
| Language: | English |
| Published: |
2021
|
| Series: | Science and Innovation |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001320931 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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