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Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge

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Bibliographic Details
Date:	2021
Main Authors:	Yu. V. Kovtun, G. P. Glazunov, V. E. Moiseenko, S. M. Maznichenko, M. N. Bondarenko, A. L. Konotopskiy, Y. V. Siusko, I. K. Tarasov, A. N. Shapoval, A. V. Lozin
Format:	Article
Language:	English
Published:	2021
Series:	Science and Innovation
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001320931
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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