Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters
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| Date: | 2012 |
|---|---|
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
2012
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| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000350278 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859543630908227584 |
|---|---|
| author | A. Sarikov V. Naseka |
| author_facet | A. Sarikov V. Naseka |
| author_sort | A. Sarikov |
| collection | Open-Science |
| first_indexed | 2025-07-22T12:19:48Z |
| format | Article |
| id | open-sciencenbuvgovua-90739 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T12:19:48Z |
| publishDate | 2012 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-907392024-04-17T16:37:35Z Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters A. Sarikov V. Naseka 1560-8034 2012 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000350278 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics A. Sarikov V. Naseka Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters |
| title | Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters |
| title_full | Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters |
| title_fullStr | Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters |
| title_full_unstemmed | Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters |
| title_short | Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters |
| title_sort | characteristics of gettering process in multicrystalline si wafers with combined porous si/al getters |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000350278 |
| work_keys_str_mv | AT asarikov characteristicsofgetteringprocessinmulticrystallinesiwaferswithcombinedporoussialgetters AT vnaseka characteristicsofgetteringprocessinmulticrystallinesiwaferswithcombinedporoussialgetters |