Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters
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| Datum: | 2012 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2012
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| Schriftenreihe: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000350278 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-907392024-04-17T16:37:35Z Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters A. Sarikov V. Naseka 1560-8034 2012 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000350278 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics A. Sarikov V. Naseka Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters |
| format |
Article |
| author |
A. Sarikov V. Naseka |
| author_facet |
A. Sarikov V. Naseka |
| author_sort |
A. Sarikov |
| title |
Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters |
| title_short |
Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters |
| title_full |
Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters |
| title_fullStr |
Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters |
| title_full_unstemmed |
Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters |
| title_sort |
characteristics of gettering process in multicrystalline si wafers with combined porous si/al getters |
| publishDate |
2012 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000350278 |
| work_keys_str_mv |
AT asarikov characteristicsofgetteringprocessinmulticrystallinesiwaferswithcombinedporoussialgetters AT vnaseka characteristicsofgetteringprocessinmulticrystallinesiwaferswithcombinedporoussialgetters |
| first_indexed |
2025-07-22T12:19:48Z |
| last_indexed |
2025-07-22T12:19:48Z |
| _version_ |
1850420922927808512 |