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Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films

Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films

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Bibliographic Details
Main Authors: Yu. Yu. Bacherikov, N. S. Boltovets, R. V. Konakova, Yu. Kolyadina, T. M. Lednova, O. B. Okhrimenko
Format: Article
Language:English
Published: 2012
Series:Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000350279
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spelling open-sciencenbuvgovua-907402024-04-17T16:37:35Z Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films Yu. Yu. Bacherikov N. S. Boltovets R. V. Konakova Yu. Kolyadina T. M. Lednova O. B. Okhrimenko 1560-8034 2012 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000350279 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Semiconductor Physics, Quantum Electronics and Optoelectronics
spellingShingle Semiconductor Physics, Quantum Electronics and Optoelectronics
Yu. Yu. Bacherikov
N. S. Boltovets
R. V. Konakova
Yu. Kolyadina
T. M. Lednova
O. B. Okhrimenko
Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films
format Article
author Yu. Yu. Bacherikov
N. S. Boltovets
R. V. Konakova
Yu. Kolyadina
T. M. Lednova
O. B. Okhrimenko
author_facet Yu. Yu. Bacherikov
N. S. Boltovets
R. V. Konakova
Yu. Kolyadina
T. M. Lednova
O. B. Okhrimenko
author_sort Yu. Yu. Bacherikov
title Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films
title_short Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films
title_full Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films
title_fullStr Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films
title_full_unstemmed Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films
title_sort interface features of sio2/sic heterostructures according to methods for producing the sio2 thin films
publishDate 2012
url http://jnas.nbuv.gov.ua/article/UJRN-0000350279
work_keys_str_mv AT yuyubacherikov interfacefeaturesofsio2sicheterostructuresaccordingtomethodsforproducingthesio2thinfilms
AT nsboltovets interfacefeaturesofsio2sicheterostructuresaccordingtomethodsforproducingthesio2thinfilms
AT rvkonakova interfacefeaturesofsio2sicheterostructuresaccordingtomethodsforproducingthesio2thinfilms
AT yukolyadina interfacefeaturesofsio2sicheterostructuresaccordingtomethodsforproducingthesio2thinfilms
AT tmlednova interfacefeaturesofsio2sicheterostructuresaccordingtomethodsforproducingthesio2thinfilms
AT obokhrimenko interfacefeaturesofsio2sicheterostructuresaccordingtomethodsforproducingthesio2thinfilms
first_indexed 2024-04-18T05:02:32Z
last_indexed 2024-04-18T05:02:32Z
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