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Interface features of SiO2/SiC heterostructures according to methods for producing the SiO2 thin films

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Bibliographic Details
Date:	2012
Main Authors:	Yu. Yu. Bacherikov, N. S. Boltovets, R. V. Konakova, Yu. Kolyadina, T. M. Lednova, O. B. Okhrimenko
Format:	Article
Language:	English
Published:	2012
Series:	Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000350279
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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