Mechanical scanning probe nanolithography: modeling and application
Збережено в:
| Дата: | 2012 |
|---|---|
| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2012
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| Назва видання: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000350384 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859543635147620352 |
|---|---|
| author | P. M. Lytvyn O. S. Lytvyn O. M. Dyachynska K. P. Grytsenko S. Schrader I. V. Prokopenko |
| author_facet | P. M. Lytvyn O. S. Lytvyn O. M. Dyachynska K. P. Grytsenko S. Schrader I. V. Prokopenko |
| author_sort | P. M. Lytvyn |
| collection | Open-Science |
| first_indexed | 2025-07-22T12:20:01Z |
| format | Article |
| id | open-sciencenbuvgovua-90759 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T12:20:01Z |
| publishDate | 2012 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-907592024-04-17T16:37:47Z Mechanical scanning probe nanolithography: modeling and application P. M. Lytvyn O. S. Lytvyn O. M. Dyachynska K. P. Grytsenko S. Schrader I. V. Prokopenko 1560-8034 2012 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000350384 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics P. M. Lytvyn O. S. Lytvyn O. M. Dyachynska K. P. Grytsenko S. Schrader I. V. Prokopenko Mechanical scanning probe nanolithography: modeling and application |
| title | Mechanical scanning probe nanolithography: modeling and application |
| title_full | Mechanical scanning probe nanolithography: modeling and application |
| title_fullStr | Mechanical scanning probe nanolithography: modeling and application |
| title_full_unstemmed | Mechanical scanning probe nanolithography: modeling and application |
| title_short | Mechanical scanning probe nanolithography: modeling and application |
| title_sort | mechanical scanning probe nanolithography: modeling and application |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000350384 |
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