Mechanical scanning probe nanolithography: modeling and application
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| Date: | 2012 |
|---|---|
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2012
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| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000350384 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-90759 |
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open-sciencenbuvgovua-907592024-04-17T16:37:47Z Mechanical scanning probe nanolithography: modeling and application P. M. Lytvyn O. S. Lytvyn O. M. Dyachynska K. P. Grytsenko S. Schrader I. V. Prokopenko 1560-8034 2012 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000350384 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics P. M. Lytvyn O. S. Lytvyn O. M. Dyachynska K. P. Grytsenko S. Schrader I. V. Prokopenko Mechanical scanning probe nanolithography: modeling and application |
| format |
Article |
| author |
P. M. Lytvyn O. S. Lytvyn O. M. Dyachynska K. P. Grytsenko S. Schrader I. V. Prokopenko |
| author_facet |
P. M. Lytvyn O. S. Lytvyn O. M. Dyachynska K. P. Grytsenko S. Schrader I. V. Prokopenko |
| author_sort |
P. M. Lytvyn |
| title |
Mechanical scanning probe nanolithography: modeling and application |
| title_short |
Mechanical scanning probe nanolithography: modeling and application |
| title_full |
Mechanical scanning probe nanolithography: modeling and application |
| title_fullStr |
Mechanical scanning probe nanolithography: modeling and application |
| title_full_unstemmed |
Mechanical scanning probe nanolithography: modeling and application |
| title_sort |
mechanical scanning probe nanolithography: modeling and application |
| publishDate |
2012 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000350384 |
| work_keys_str_mv |
AT pmlytvyn mechanicalscanningprobenanolithographymodelingandapplication AT oslytvyn mechanicalscanningprobenanolithographymodelingandapplication AT omdyachynska mechanicalscanningprobenanolithographymodelingandapplication AT kpgrytsenko mechanicalscanningprobenanolithographymodelingandapplication AT sschrader mechanicalscanningprobenanolithographymodelingandapplication AT ivprokopenko mechanicalscanningprobenanolithographymodelingandapplication |
| first_indexed |
2025-07-22T12:20:01Z |
| last_indexed |
2025-07-22T12:20:01Z |
| _version_ |
1850420925261938688 |