Perspectives for using technology of laser thermolithography
Збережено в:
Дата: | 2012 |
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Автори: | , , , |
Формат: | Стаття |
Мова: | English |
Опубліковано: |
2012
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Назва видання: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000350385 |
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Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-907602024-04-17T16:37:47Z Perspectives for using technology of laser thermolithography A. A. Kryuchyn A. S. Lapchuk A. I. Brytskyi S. O. Kostyukevych 1560-8034 2012 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000350385 Article |
institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
collection |
Open-Science |
language |
English |
series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics A. A. Kryuchyn A. S. Lapchuk A. I. Brytskyi S. O. Kostyukevych Perspectives for using technology of laser thermolithography |
format |
Article |
author |
A. A. Kryuchyn A. S. Lapchuk A. I. Brytskyi S. O. Kostyukevych |
author_facet |
A. A. Kryuchyn A. S. Lapchuk A. I. Brytskyi S. O. Kostyukevych |
author_sort |
A. A. Kryuchyn |
title |
Perspectives for using technology of laser thermolithography |
title_short |
Perspectives for using technology of laser thermolithography |
title_full |
Perspectives for using technology of laser thermolithography |
title_fullStr |
Perspectives for using technology of laser thermolithography |
title_full_unstemmed |
Perspectives for using technology of laser thermolithography |
title_sort |
perspectives for using technology of laser thermolithography |
publishDate |
2012 |
url |
http://jnas.nbuv.gov.ua/article/UJRN-0000350385 |
work_keys_str_mv |
AT aakryuchyn perspectivesforusingtechnologyoflaserthermolithography AT aslapchuk perspectivesforusingtechnologyoflaserthermolithography AT aibrytskyi perspectivesforusingtechnologyoflaserthermolithography AT sokostyukevych perspectivesforusingtechnologyoflaserthermolithography |
first_indexed |
2024-04-18T05:02:37Z |
last_indexed |
2024-04-18T05:02:37Z |
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