Photostimulated etching of germanium chalcogenide films
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| Date: | 2012 |
|---|---|
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2012
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| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000350389 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-907642024-04-17T16:37:47Z Photostimulated etching of germanium chalcogenide films V. A. Danko I. Z. Indutnyi V. I. Mynko P. E. Shepeliavyi M. V. Lukyanyuk O. S. Litvin 1560-8034 2012 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000350389 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics V. A. Danko I. Z. Indutnyi V. I. Mynko P. E. Shepeliavyi M. V. Lukyanyuk O. S. Litvin Photostimulated etching of germanium chalcogenide films |
| format |
Article |
| author |
V. A. Danko I. Z. Indutnyi V. I. Mynko P. E. Shepeliavyi M. V. Lukyanyuk O. S. Litvin |
| author_facet |
V. A. Danko I. Z. Indutnyi V. I. Mynko P. E. Shepeliavyi M. V. Lukyanyuk O. S. Litvin |
| author_sort |
V. A. Danko |
| title |
Photostimulated etching of germanium chalcogenide films |
| title_short |
Photostimulated etching of germanium chalcogenide films |
| title_full |
Photostimulated etching of germanium chalcogenide films |
| title_fullStr |
Photostimulated etching of germanium chalcogenide films |
| title_full_unstemmed |
Photostimulated etching of germanium chalcogenide films |
| title_sort |
photostimulated etching of germanium chalcogenide films |
| publishDate |
2012 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000350389 |
| work_keys_str_mv |
AT vadanko photostimulatedetchingofgermaniumchalcogenidefilms AT izindutnyi photostimulatedetchingofgermaniumchalcogenidefilms AT vimynko photostimulatedetchingofgermaniumchalcogenidefilms AT peshepeliavyi photostimulatedetchingofgermaniumchalcogenidefilms AT mvlukyanyuk photostimulatedetchingofgermaniumchalcogenidefilms AT oslitvin photostimulatedetchingofgermaniumchalcogenidefilms |
| first_indexed |
2025-07-22T12:20:04Z |
| last_indexed |
2025-07-22T12:20:04Z |
| _version_ |
1850420925797761024 |