Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition
Збережено в:
| Дата: | 2012 |
|---|---|
| Автори: | , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2012
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| Назва видання: | Ukrainian journal of physics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000678456 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859545256764112896 |
|---|---|
| author | A. Rahmati M. Khanzadeh |
| author_facet | A. Rahmati M. Khanzadeh |
| author_sort | A. Rahmati |
| collection | Open-Science |
| first_indexed | 2025-07-22T13:11:07Z |
| format | Article |
| id | open-sciencenbuvgovua-93080 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T13:11:07Z |
| publishDate | 2012 |
| record_format | dspace |
| series | Ukrainian journal of physics |
| spelling | open-sciencenbuvgovua-930802024-04-17T16:55:13Z Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition A. Rahmati M. Khanzadeh 2071-0186 2012 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0000678456 Article |
| spellingShingle | Ukrainian journal of physics A. Rahmati M. Khanzadeh Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition |
| title | Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition |
| title_full | Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition |
| title_fullStr | Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition |
| title_full_unstemmed | Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition |
| title_short | Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition |
| title_sort | effect of nitrogen partial pressure on reactive magnetron sputtering from ti13cu87 metalloid target: simulation of chemical composition |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000678456 |
| work_keys_str_mv | AT arahmati effectofnitrogenpartialpressureonreactivemagnetronsputteringfromti13cu87metalloidtargetsimulationofchemicalcomposition AT mkhanzadeh effectofnitrogenpartialpressureonreactivemagnetronsputteringfromti13cu87metalloidtargetsimulationofchemicalcomposition |