Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition
Збережено в:
| Дата: | 2012 |
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| Автори: | , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2012
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| Назва видання: | Ukrainian journal of physics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000678456 |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-93080 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-930802024-04-17T16:55:13Z Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition A. Rahmati M. Khanzadeh 2071-0186 2012 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0000678456 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Ukrainian journal of physics |
| spellingShingle |
Ukrainian journal of physics A. Rahmati M. Khanzadeh Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition |
| format |
Article |
| author |
A. Rahmati M. Khanzadeh |
| author_facet |
A. Rahmati M. Khanzadeh |
| author_sort |
A. Rahmati |
| title |
Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition |
| title_short |
Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition |
| title_full |
Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition |
| title_fullStr |
Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition |
| title_full_unstemmed |
Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition |
| title_sort |
effect of nitrogen partial pressure on reactive magnetron sputtering from ti13cu87 metalloid target: simulation of chemical composition |
| publishDate |
2012 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000678456 |
| work_keys_str_mv |
AT arahmati effectofnitrogenpartialpressureonreactivemagnetronsputteringfromti13cu87metalloidtargetsimulationofchemicalcomposition AT mkhanzadeh effectofnitrogenpartialpressureonreactivemagnetronsputteringfromti13cu87metalloidtargetsimulationofchemicalcomposition |
| first_indexed |
2024-04-18T05:12:04Z |
| last_indexed |
2024-04-18T05:12:04Z |
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1796886992119660544 |