Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition

Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition

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Bibliographic Details
Date:2012
Main Authors: A. Rahmati, M. Khanzadeh
Format: Article
Language:English
Published: 2012
Series:Ukrainian journal of physics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000678456
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-93080
record_format dspace
spelling open-sciencenbuvgovua-930802024-04-17T16:55:13Z Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition A. Rahmati M. Khanzadeh 2071-0186 2012 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0000678456 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Ukrainian journal of physics
spellingShingle Ukrainian journal of physics
A. Rahmati
M. Khanzadeh
Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition
format Article
author A. Rahmati
M. Khanzadeh
author_facet A. Rahmati
M. Khanzadeh
author_sort A. Rahmati
title Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition
title_short Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition
title_full Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition
title_fullStr Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition
title_full_unstemmed Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition
title_sort effect of nitrogen partial pressure on reactive magnetron sputtering from ti13cu87 metalloid target: simulation of chemical composition
publishDate 2012
url http://jnas.nbuv.gov.ua/article/UJRN-0000678456
work_keys_str_mv AT arahmati effectofnitrogenpartialpressureonreactivemagnetronsputteringfromti13cu87metalloidtargetsimulationofchemicalcomposition
AT mkhanzadeh effectofnitrogenpartialpressureonreactivemagnetronsputteringfromti13cu87metalloidtargetsimulationofchemicalcomposition
first_indexed 2025-07-22T13:11:07Z
last_indexed 2025-07-22T13:11:07Z
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