Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma
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| Дата: | 2012 |
|---|---|
| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2012
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| Назва видання: | Superhard Materials |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000696639 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-93155 |
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| record_format |
dspace |
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open-sciencenbuvgovua-931552024-04-17T16:55:54Z Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma V. S. Sedov V. G. Ralchenko A. A. Khomich A. I. Sizov T. M. Zvukova V. I. Konov 0203-3119 2012 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000696639 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Superhard Materials |
| spellingShingle |
Superhard Materials V. S. Sedov V. G. Ralchenko A. A. Khomich A. I. Sizov T. M. Zvukova V. I. Konov Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma |
| format |
Article |
| author |
V. S. Sedov V. G. Ralchenko A. A. Khomich A. I. Sizov T. M. Zvukova V. I. Konov |
| author_facet |
V. S. Sedov V. G. Ralchenko A. A. Khomich A. I. Sizov T. M. Zvukova V. I. Konov |
| author_sort |
V. S. Sedov |
| title |
Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma |
| title_short |
Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma |
| title_full |
Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma |
| title_fullStr |
Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma |
| title_full_unstemmed |
Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma |
| title_sort |
stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma |
| publishDate |
2012 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000696639 |
| work_keys_str_mv |
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2024-04-18T05:12:23Z |
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2024-04-18T05:12:23Z |
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