Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma

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Datum:2012
Hauptverfasser: V. S. Sedov, V. G. Ralchenko, A. A. Khomich, A. I. Sizov, T. M. Zvukova, V. I. Konov
Format: Artikel
Sprache:Englisch
Veröffentlicht: 2012
Schriftenreihe:Superhard Materials
Online Zugang:http://jnas.nbuv.gov.ua/article/UJRN-0000696639
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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author V. S. Sedov
V. G. Ralchenko
A. A. Khomich
A. I. Sizov
T. M. Zvukova
V. I. Konov
author_facet V. S. Sedov
V. G. Ralchenko
A. A. Khomich
A. I. Sizov
T. M. Zvukova
V. I. Konov
author_sort V. S. Sedov
collection Open-Science
first_indexed 2025-07-22T13:12:50Z
format Article
id open-sciencenbuvgovua-93155
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
language English
last_indexed 2025-07-22T13:12:50Z
publishDate 2012
record_format dspace
series Superhard Materials
spelling open-sciencenbuvgovua-931552024-04-17T16:55:54Z Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma V. S. Sedov V. G. Ralchenko A. A. Khomich A. I. Sizov T. M. Zvukova V. I. Konov 0203-3119 2012 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000696639 Article
spellingShingle Superhard Materials
V. S. Sedov
V. G. Ralchenko
A. A. Khomich
A. I. Sizov
T. M. Zvukova
V. I. Konov
Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma
title Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma
title_full Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma
title_fullStr Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma
title_full_unstemmed Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma
title_short Stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma
title_sort stimulation of the diamond nucleation on silicon substrates with a layer of polymeric precursor in deposition of diamond films by microwave plasma
url http://jnas.nbuv.gov.ua/article/UJRN-0000696639
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AT vgralchenko stimulationofthediamondnucleationonsiliconsubstrateswithalayerofpolymericprecursorindepositionofdiamondfilmsbymicrowaveplasma
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AT aisizov stimulationofthediamondnucleationonsiliconsubstrateswithalayerofpolymericprecursorindepositionofdiamondfilmsbymicrowaveplasma
AT tmzvukova stimulationofthediamondnucleationonsiliconsubstrateswithalayerofpolymericprecursorindepositionofdiamondfilmsbymicrowaveplasma
AT vikonov stimulationofthediamondnucleationonsiliconsubstrateswithalayerofpolymericprecursorindepositionofdiamondfilmsbymicrowaveplasma